“The GEMStar-8 ALD system is critical to our nanomaterials for clean energy research. In particular, the particle holder has been working perfectly for ALD coatings on nanostructured materials for Li batteries and fuel cells …… even better than expected.” Prof. Andy Sun, Mechanical and Materials Engineering, University of Western Ontario
GEMStar XT offers 100,150 and 200mm Thermal ALD and 200mm PEALD (Plasma Enhanced) SystemsCoating Services for ALD Materials and Processes
We design ALD process
to suit your specific performance requirements.
Ask us about your needs.
“…We [tried] other sources for ALD but you were the only ones that made it happen…”
Dr. Tobias Schaedler, HRL Laboratories, LLC, Malibu, California.
HRL Researchers Develop World's Lightest Material
Custom Process Systems
We design and fabricate custom deposition, gas management and metrology equipment meeting your specific needs.
We invented and patented Atomic Layer Deposition (ALD) technology enabling high-gain and long life Microchannel Plates Amplifiers using virtually any substrate material in any size or shape.