GEMStar™ ALD Systems

GEMStar-8 With GloveBox

Engineered ALD Materials Engineered Materials Custom Process Systems GEMStar-CAT Dual
Atomic Layer Deposition (ALD) Systems and Coating Services

GEMStar Product Line GEMStar PEALD

GEMStar™ Thermal And Plasma-Enhanced Atomic Layer Deposition Process Systems

We manufacture Benchtop Atomic Layer Deposition (ALD) Process Systems for both Thermal ALD and PEALD applications. Although our systems are much smaller than competitors, all are designed to deposit uniform, defect free resistive and emissive coatings, even deep inside high aspect ratio (HAR) structures such as Microchannel Plates, Channel Electron Multipliers and Particles. High quality films with ultra-high aspect ratios are key features of our systems.

“The GEMStar-8 ALD system is critical to our nanomaterials for clean energy research. In particular, the particle holder has been working perfectly for ALD coatings on nanostructured materials for Li batteries and fuel cells …… even better than expected.”

Prof. Andy Sun, Mechanical and Materials Engineering, University of Western Ontario


Coating Services for ALD Materials and Processes

We design ALD process to suit your specific performance requirements. Ask us about your needs.

“…We [tried] other sources for ALD but you were the only ones that made it happen…”

Dr. Tobias Schaedler, HRL Laboratories, LLC, Malibu, California

HRL Researchers Develop World's Lightest Material for further information

Custom Process Systems

We design and fabricate custom deposition, gas management and metrology equipment meeting your specific needs.

ALD Microchannel Plate (MCP) Coatings

We invented, developed, patented and proved Atomic Layer Deposition (ALD) technology enabling high-gain and long life Microchannel Plates Amplifiers using virtually any substrate material in any size or shape.