We manufacture Benchtop Atomic Layer Deposition (ALD) Process Systems
for both Thermal ALD and PEALD
Although our systems are much smaller than competitors,
all are designed to deposit uniform, defect free resistive and emissive coatings, even deep inside high aspect ratio (HAR) structures such as
Microchannel Plates, Channel Electron Multipliers and Particles. High
quality films with ultra-high aspect ratios are key features of our systems.
“The GEMStar-8 ALD system is critical to our nanomaterials for clean energy research. In particular, the particle holder has been working perfectly for ALD coatings on nanostructured materials for Li batteries and fuel cells …… even better than expected.”
Coating Services for ALD Materials and Processes
We design ALD process
to suit your specific performance requirements.
Ask us about your needs.
“…We [tried] other sources for ALD but you were the only ones that made it happen…”Dr. Tobias Schaedler, HRL Laboratories, LLC, Malibu, California
We design and fabricate custom deposition, gas management and metrology equipment meeting your specific needs.
We invented, developed, patented and proved Atomic Layer Deposition (ALD) technology enabling high-gain and long life Microchannel Plates Amplifiers using virtually any substrate material in any size or shape.