GEMStar™ ALD Systems

GEMStar-8 With GloveBox

Engineered ALD Materials Engineered Materials Custom Process Systems GEMStar-CAT Dual
Atomic Layer Deposition (ALD) Systems and Coating Services
PRODUCT LINE
GEMStar™ XT Thermal and Plasma-Enhanced Atomic Layer Deposition Systems
We design Benchtop Atomic Layer Deposition (ALD) Process Systems for both Thermal ALD and PEALD applications. Much smaller than competitors, our systems deposit uniform resistive and emissive coatings.

“The GEMStar-8 ALD system is critical to our nanomaterials for clean energy research. In particular, the particle holder has been working perfectly for ALD coatings on nanostructured materials for Li batteries and fuel cells …… even better than expected.” Prof. Andy Sun, Mechanical and Materials Engineering, University of Western Ontario


GEMStar XT offers 100,150 and 200mm Thermal ALD and 200mm PEALD (Plasma Enhanced) Systems

GEMStar Product Line GEMStar XT PEALD SystemCoating Services for ALD Materials and Processes

We design ALD process to suit your specific performance requirements. Ask us about your needs.

“…We [tried] other sources for ALD but you were the only ones that made it happen…” Dr. Tobias Schaedler, HRL Laboratories, LLC, Malibu, California. HRL Researchers Develop World's Lightest Material

Custom Process Systems

We design and fabricate custom deposition, gas management and metrology equipment meeting your specific needs.


ALD Microchannel Plate (MCP) Coatings

We invented and patented Atomic Layer Deposition (ALD) technology enabling high-gain and long life Microchannel Plates Amplifiers using virtually any substrate material in any size or shape.