Customer Testimonials

Product Matrix


GEMStar XT Thermal

GEMStar XT-R P Ready


XT Options

Material Bottles

Load Lock

GLovebox Interface

500°C Heated Platen

Legacy Systems


GEMStar-CAT Dual


GEMStar-CAT Dual™ Dual Reactor ALD and Catalyst Synthesis System

The custom GEMStar-DUAL CatalystTM System developed in partnership with the Chemical Sciences and Engineering Division of Argonne National Laboratory has unique capabilities.

Arradiance used its skill combining Atomic Layer Deposition, System Design and Controls to produce a system that is unparalleled for Catalyst synthesis research

Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis–catalysis testing tool

Jeffrey Camacho-Bunquin,1 Heng Shou,1 Payoli Aich,1,2 David R. Beaulieu,3
Helmut Klotzsch,3 Stephen Bachman,3 Christopher L. Marshall,1 Adam Hock,1,4
and Peter Stair1,5
1Chemical Sciences and Engineering Division, Argonne National Laboratory, Lemont, Illinois 60439, USA
2Department of Chemical Engineering, University of Illinois at Chicago, Chicago, Illinois 60607, USA
3Arradiance Inc., Sudbury, Massachusetts 01776, USA
4Department of Chemistry, Illinois Institute of Technology, Chicago, Illinois 60616, USA
5Department of Chemistry, Northwestern University, Evanston, Illinois 60208, USA

(Received 24 June 2015; accepted 4 August 2015; published online 24 August 2015)

An integrated atomic layer deposition synthesis-catalysis (I-ALD-CAT) tool was developed. It combines an ALD manifold in-line with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT delivery system consists of 12 different metal ALD precursor channels, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10−3 to 1 bar and 300–1000 K, respectively. The instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the synthesis of platinum active sites and Al2O3 overcoats, and evaluation of catalyst propylene hydrogenation activity. © 2015 AIP Publishing LLC. []

Contact for more information on GEMStar Systems