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GEMStar XT Benchtop Atomic Layer Deposition Systems and Options

GEMStar XT ALD Systems
The most capable compact system on the market

The Arradiance GEMStar XT product family delivers high quality performance in a compact Benchtop platform. Now with more configurable options to meet specific Customer requirements and budgets, we are confident that GEMStar can take your ALD research or low volume manufacturing to the next level.

XT systems can be configured as single (4 ALD port) or dual (8 ALD port) 200 °C manifolds with four easily locatable ALD bottle material heated zones, and up to four external gas lines. All systems have one port equipped with our Pulsed Vapor Push technology for low vapor pressure materials.

Our GEMFlow™ scripting software allows easy creation of jobs for the most complicated nanaolaminate films providing real time history of process and equipment parameters.

For more information please: Contact Arradiance

GEMStar XT Options
GEMStar XT Systems offer many standard options to enhance system process and metrology capabilities. Most are easily field upgradeable. We also support custom requirements.


Vacuum Pumps


Sample Processing