GEMStar XT ALD Systems
The most capable compact system on the market
The Arradiance GEMStar XT product family delivers high quality performance in a compact Benchtop platform. Now with more configurable options to meet specific Customer requirements and budgets, we are confident that GEMStar can take your ALD research or low volume manufacturing to the next level.
XT systems can be configured as single (4 ALD port) or dual (8 ALD port) 200 °C manifolds with four easily locatable ALD bottle material heated zones, and up to four external gas lines. All systems have one port equipped with our Pulsed Vapor Push technology for low vapor pressure materials.
Our GEMFlow™ scripting software allows easy creation of jobs for the most complicated nanaolaminate films providing real time history of process and equipment parameters.
For more information please: Contact Arradiance
||GEMStar XT-P Thermal and PEALD
Equipped with a 300 Watt air cooled direct Inductively Coupled Plasma (ICP) RF system with four metal sealed user selectable Mass Flow Controlled gas inputs, the GEMStar XT-DP system is a powerful plasma enhanced system to extend your research and processing requirements to the next level using Plasma Enhanced ALD.
||GEMStar XT-R Thermal ALD upgradeable to PEALD
If your current requirements are thermal ALD, but you need a future path to PEALD, GEMStar XT-R systems provides the reactor and control capability to easily field upgrade to Plasma Enhanced (PEALD) in the future having capabilities of the GEMStar XT-P system.
||GEMStar XT Thermal ALD
The most configurable Thermal Atomic Layer Deposition system with a global installed base supporting a wide range of technologies and markets. Whether you are focused on Solar Cell, biotechnology or energy, this workhorse will deliver on your most demanding films Enabling Technologies for Our World and Beyond
GEMStar XT Options
GEMStar XT Systems offer many standard options to enhance system process and metrology capabilities. Most are easily field upgradeable. We also support custom requirements.
We do not manufacture a Glovebox. We work with leading Glovebox manufactures including INERT, MBRAUN, VTI, LC and others. Our interface allows GEMStar XT to easily interface our systems
Although not required for most process applications, Arradiance offers a manual load lock system to easily degas samples before being introduced to the ALD reactor.
DOT4B 150ML Material Bottle
GEMStar Certified Cylinders can also be purchased directly through Precision Fabricators Ltd.
Go to: http://www.precision-fab.com
||Material Heater Jackets|
Systems comes with two material heater zones, upgraded to four zones with additional heater jackets.
||500°C Heated Platen|
Single wafer high temperature processing replacing the standard door in 100mm, 150mm STD, and 200mm configurations.
Filled GEMStar Certified Cylinders can be purchased directly through STREM Chemicals, Inc.
Go to: http://www.strem.com
Should your process require a water free film process, we offer a high-performance Ozone generator and hardware to allow injection though one of GEMStar XT’s external gas inputs.
Arradiance offers many options for batch processing
Arradiance offers several options for particle coating