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Customer Testimonials

“The Texas State University Nanofabrication Research Service Center is extremely pleased with the versatility of our GEMStar XT-DP PEALD System. It contains an extremely generous number of metalorganic (4) and oxidizer ports (4) as well as a pulsed vapor push port, and precursor heaters (2) that are all included in the base package. The equipment is compact, economical, easily installed, well documented, and utilizes an intuitive user interface. Arradiance technical staff have rapidly responded to my requests for recipes and new chemistry support. To date we have trained more than 25 users in our shared cleanroom facility who have successfully deposited TiO2, Al2O3, ZnO, Al:ZnO, ZrO2, and/or SnO2 for their various research and course projects.”
Dr. Casey Smith - Cleanroom Director, Shared Research Operations
Texas State University

“The Arradiance GEMStar-XT reactor in my laboratory is consistently producing high quality hole-blocking layer TiO2 film in my perovskite solar cell research. The ALD-based TiO2 layer through GEMStar-XT enables a high power conversion efficiency of 20% repeatedly and I am very pleased with the performance of GEMStar ALD tool.”
Prof. Satoshi Uchida - Komaba Organization for Educational Excellence College of Arts and Sciences (KOMEX)
The University of Tokyo

“Purdue University was one of the earliest adopters of the Arradiance® GEMStar XT-P Plasma PEALD system, which we received in June 2015. Our overall experience with the GEMStar XT-P Plasma system, service and support from Arradiance® has been excellent. We primarily use the system to this point for oxides and metal depositions. The Purdue team was even successful depositing a very challenging Plasma Al film. We would highly recommend that you contact Arradiance® for your ALD or PEALD system and coating needs”
Prof. Chen Yang – Department of Chemistry, Department of Physics and Astronomy, Purdue University

“The Arradiance GEMStar-6 reactor has been in use in my laboratory for eight months continuously now and has performed consistently. It has worked from day one, and we have had no downtime at all so far, not even pump oil changes (with the exhaust abatement system). The chamber temperature is well controlled and the films are homogeneous.”
Prof. Julien Bachmann PhD, Inorganic and General Chemistry, University of Erlangen-Nürnberg

“The GEMStar-8 ALD system is critical to our nanomaterials for clean energy research. In particular, the particle holder has been working perfectly for ALD coatings on nanostructured materials for Li batteries and fuel cells …… even better than expected.”
Prof. Andy Sun PhD, Mechanical and Materials Engineering, University of Western Ontario

“We are loving the tool here [GEMStar-8], using quite a lot and it is giving great results!.”
Mark R. April, Equipment Engineer, Draper Laboratory

“GEMStar-6 has everything our lab environment should need in an ALD tool. It is small, flexible and can handle up to six inch wafers. We also like the 1” height of the chamber that accommodates small, three dimensional objects and the port we can use for in-situ metrology. The design appears to be rugged and easy to service.”
John F. Conley, Jr. ,PhD and Professor at Oregon State University

“Much of our research is based around arrays of vertical nanostructures. The GEMStar ALD system allows us to deposit very uniform metallic and oxide thin films over these structures”
Steve Shepard, Nanofabrication Facility Manager, Boston College

“We study the properties of biomolecules using various nanoscale systems. This requires the fabrication of uniform ultrathin freestanding membranes, some of which are deposited using our GEMStar ALD system. This system is small, easy to use, low-maintenance, and has been a workhorse for us – it just runs!” Prof. Meni Wanunu, Departments of Physics and Chemistry/Chemical Biology
The Wanunu Lab, Nanoscale Biophysics, Northeastern University

“The GEMStar-8 ALD system is critical to our nanomaterials for clean energy research. In particular, the particle holder has been working perfectly for ALD coatings on nanostructured materials for Li batteries and fuel cells …… even better than expected.”
Prof. Andy Sun, Mechanical and Materials Engineering, University of Western Ontario

“…We [tried] other sources for ALD but you were the only ones that made it happen…”
Dr. Tobias Schaedler, HRL Laboratories, LLC, Malibu, California HRL Researchers Develop World's Lightest Material

“I really appreciate how fast you got this done and how helpful you were.”
Mark Ziffer, Graduate student, University of Washington The Ginger Lab