Arradiance is an Atomic Layer Deposition Company and a Supplier of Equipment and Foundry Services
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Deposition Systems

Arradiance Deposition Systems

Engineered for world-class performance on a Benchtop

We help transform your ղTechnology vision into new product technology

GEMStar XT™ systems can be configured as single (4 ALD port) or dual (8 ALD port) 200 °C manifolds with four easily locatable ALD bottle material heated zones, and up to four external gas lines. All systems have one port equipped with our Pulsed Vapor Push technology for low vapor pressure materials. Our GEMFlow™ scripting software allows easy creation of jobs for the most complicated Nano laminate films providing real time history of process and equipment parameters

For more information

Please contact Process System Sales

Specializing in Atomic Layer Deposition

Molecular Innovation™

We provide turn-key Atomic Layer Deposition (ALD) solutions. Our cutting-edge hardware is trusted by the World’s leading thin film research teams. Apply your ALD thin films with one of our compact systems or let us do it for you at our on-site rapid turn foundry

Our deposition systems are deployed worldwide developing new technology in

  • Clean-E
  • E-Storage
  • Sensors
  • µElectronics
  • ղTechnology
  • Optoelectronics
  • Catalysts

Learn More >

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GEMStar XT Deposition Systems

Glovebox Integrated Atomic Layer Deposition Process Systems

Glovebox Process Systems

Environment isolation

Single, dual, and custom stations available

Glovebox systems includes

  • Side and back mounting
  • Large and small antechambers
  • Integrated Gas Purification system
  • PLC Controller and HMI
  • GEMStar stand/fames
  • Automated antechamber regeneration
  • Automated large antechamber Purging
  • Vacuum Pump
  • Controlled to Less then 1ppm Moisture and Oxygen
GEMStar Quantum Plasma Enhanced Atomic Layer Deposition Process Systems

GEMStar Quantum

Plasma Enhanced ALD

In addition to GEMStar XT-P

Quantum includes

  • All XT-P features
  • Three Mass Flow Controlled Auxiliary Gas Inputs
  • One Mass Flow Controlled Pulsed Vapor Push Port for low vapor pressure pre-cursors
  • Arradiance RGIP™ Control System to safely handle reactive gas inputs for both Thermal and PEALD applications
  • GEMFlow™ Control Software with real time user interface
GEMStar XT-P Plasma Enhanced Atomic Layer Deposition Process Systems

GEMStar XT-P

Plasma Enhanced ALD

A powerful plasma enhanced ALD system

Extending your research and processing requirements to the next level using Plasma Enhanced ALD

XT-P Includes

  • All XT features
  • 300 Watt air cooled direct Inductively Coupled Plasma (ICP) RF system
  • Four metal sealed user selectable Mass Flow Controlled gas inputs
GEMStar XT-R Thermal ALD upgradeable to PEALD Atomic Layer Deposition Process Systems

GEMStar XT-R

Thermal ALD

Upgradeable to XT-P

If your current requirements are thermal ALD, and require a future path to PEALD, choose GEMStar XT-R

XT-R Includes

  • All XT features
  • XT-P Reactor
  • Field upgradeable XT-P
GEMStar XT Thermal Atomic Layer Deposition Process Systems

GEMStar XT

Thermal ALD

ALD deposition workhorse

Whether you are focused on Solar Cell, biotechnology or energy research

GEMStar XT will deliver on your most demanding requirement

XT includes to name a few

  • Reactor temp up to 300°C
  • Up to four movable Bottle Heated Zones
  • Gas distribution delivery up to 200°C
  • Pulsed Vapor Push (PVP™)
  • Flow-through and exposure deposition
  • Configurable substrate end effectors
  • MFC controlled carrier gas input
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More about GEMStar Quantum

GEMStar Quantum

When you need to develop new materials using reactive gases

Our latest generation of Atomic Layer Deposition (ALD) Systems resolves demanding applications required to safely handle reactive gases for both Thermal and PEALD

Quantum using Arradiance RGIP™, safely allows Mass Flow controlled injection of reactive process gas (like H2, O2, and NH3) for both Thermal ALD and PEAD in a single process.

Featuring

  • Less than of 6 ft^2 (0.6 m^2) footprint
  • 100% Air Cooled
  • Four Mass Flow Controlled Plasma Gas Inputs
  • Three Mass Flow Controlled Auxiliary Gas Inputs
  • One Mass Flow Controlled Pulsed Vapor Push Port for low vapor pressure pre-cursors
  • Arradiance RGIP™ Control System to safely handle reactive gas inputs for both Thermal and PEALD applications
  • GEMFlow™ Control Software with real time user interface

Learn More about GEMStar Quantum>

For more information

Please contact Process System Sales

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Popular Options

Arradiance ARR-08.### Glovebox Systems

ARR-08.###

Glovebox Systems

Arradiance ARR-850890 Glovebox Interface

ARR-850890

Glovebox Interface

Arradiance ARR-859000 Load Lock

ARR-859000

Load Lock

Arradiance ARR-40591B-DOT Material Bottles

ARR-40591B-DOT

Material Bottles

Arradiance ARR-850593 Material Heater Jackets

ARR-850593

Bottle Heater Jackets

Arradiance ARR-854840 End Effector System Option

ARR-854840

End Effector System

Arradiance ARR-850720 Front-Loading Tray

ARR-850720

Front-Loading Tray

Arradiance ARR-850620 200 mm Heated Susceptor

ARR-850620

Heated Susceptor

Arradiance ARR-850600-SR Particle Coating Door

ARR-850600-SR

Particle Coating

Arradiance ARR-850688 5 Pack Particle Canisters With Holder

ARR-850688

5 Particle Canisters

Arradiance ARR-850402-KF25-GP Vacuum Gauge Protector

ARR-850402-KF25-GP

Gauge Protector

Arradiance ARR-851900-C Quartz Crystal Microbalance

ARR-851900-C

QCM Microbalance

Arradiance ARR-850730 Ozone Generator

ARR-850730

Ozone Generator

Arradiance ARR-EV-A10-P-EPP Enhanced Dry Pump Package

ARR-EV-A10-P-EPP

Enhanced Dry Pump Package

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Additional System Information

Facilities requirements

for our Process Systems

Downloadable information is provided below

These include physical sizes, weights, and electrical power requirements for our current Process Systems

All our Systems are CE Marked, "Watchdog" protected, have an EMO interface. CSA Certification is available on request.

For additional information

Please contact Customer Support

Arradiance Custom ALD Systems

Custom Equipment Solutions

We provide custom systems and options

Let us know what you need

We specialize in Atomic Layer Deposition. If you can’t find exactly what you need in our standard process systems or options

Our engineering team is ready for your challenge!

Please contact Process System Sales

Papers and publications

Read how our Systems are used

Including our valued customers

Our GEMStar systems are deployed worldwide developing new technology in

  • Clean-E
  • E-Storage
  • Sensors
  • µElectronics
  • ղTechnology
  • Optoelectronics
  • Catalysts
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Recommended Vacuum Pumps and Traps

Recommended
Vacuum Pumps and Traps

For GEMStar XT process systems

Engineered to maximize performance and reliability of our GEMStar Systems

The combination of the ARR-EBARA EV-A10 EBARA DRY Pump and our ARR-RD003000 Dry Pump Multi-Trap was engineered in partnership with critical our critical suppliers to provide optimum process performance and low maintenance without sacrificing reliability

This combination is being used in our service chase and even under heavy use, we have eliminated pump failures though power unexpected outages and factory shut downs

Arradiance ARR-EV-A10-P-EPP Enhanced Dry Pump Package

ARR-EV-A10-P-EPP

Enhanced Dry Pump Package

Engineered for GEMStar XT and XT-P for optimum process performance, reliability and low pump maintenance cost

Our Enhanced dry Pump Package combines our separate products into a single offering that will minimize your maintenance costs at a great value

Arradiance ARR-RD003000 Multi-Trap

ARR-RD003000

Multi-Trap

The Arradiance MULTI-TRAP system is a high capacity, high conductance vacuum inlet trap that protects your Ebara EV-A10 pump against corrosive chemicals and abrasive particles

The system is configured to prevent both ALD induced particles and vapors from causing pump damage leaving a clean pump exhaust

Arradiance ARR-EV-A10 EBARA DRY Pump

ARR-EV-A10 EBARA

DRY Pump

Optimum for both Thermal and PEALD processes

The EBARA EV-A10 offers 35 CFM pumping Speed and N2 Gas Ballast

To extend pump life we recommend the

Enhanced Dry Pump Package