About Arradiance.
Benchtop and floor-standing ALD, PE-ALD, and MLD systems, plus an on-site coating foundry, engineered in Littleton, MA since 2004.
One company, two pillars.
Arradiance designs and manufactures atomic layer deposition (ALD) and molecular layer deposition (MLD) systems for university and corporate R&D labs — the GEMStar XT and PRIME product families — engineered around reproducible chemistry, multi-precursor flexibility, and a service relationship that lasts beyond the install.
When customers need a film deposited but not a tool of their own, our Littleton, MA foundry runs rapid-turn ALD and MLD coatings on their substrates — useful for one-off jobs, small batches, or qualifying a process before they invest in a system.

From electron emitters to an ALD systems business.
Arradiance was founded in 2004 with a DARPA contract to develop electron field-emission arrays using microchannel technology. The team built ALD equipment internally to nano-engineer those microchannel plates, and the equipment became the product. Today Arradiance ships GEMStar and PRIME systems worldwide and runs the Littleton, MA coating foundry. More than 250 independently published studies have used Arradiance systems.
Arradiance has since acquired Lotus Applied Technology, a pioneer in ALD research and thin-film deposition based in Hillsboro, Oregon. Lotus AT continues under its own name as an Arradiance company, and its patented rapid spatial and roll-to-roll ALD extends the range from research-grade instruments through to production-scale deposition.
Meet the team.
A responsive team in Littleton, MA. Click any name to view their LinkedIn.
Engineered in Littleton. Installed everywhere.
The team, the production line, and the foundry are all in one building in Littleton, Massachusetts. When you talk to a specialist, you’re talking to someone who works alongside the people who built your system.
From our site outside of Boston, over 200 Arradiance systems have shipped to research and production labs across the world.
Arradiance LLC
11A Beaver Brook Rd
Littleton, MA 01460
(508) 202-0593

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