GEMStar™ XT Atomic Layer Deposition Systems
With our focus on performance, ease of installation, and reliability, we produce the most capable and
compact ALD process systems available for both Thermal and Plasma Enhanced (PEALD) applications.
We offer single and batch operation for substrates up to 210 mm square. Please see our products and options
Foundry Services For Atomic Layer Deposition
Leveraging process and equipment technologies
forged in the most challenging ALD Nanofilm environment, we offer Customers
access to functional nanofilms from research to production. Learn more about our Foundry Services