PRIME™ ALD & MLD systems, for production and R&D.
Transformative, next-generation MLD & ALD solutions for advanced materials and complex structures. Leveraging the reliability and low cost of ownership of the proven GEMStar XT™ platform, PRIME delivers larger chambers, broader precursor support, and the capability to scale from research into production.
More chamber. More chemistry. More control.
PRIME is built for the labs and production teams pushing beyond the benchtop, whether you’re ramping up throughput or sizing up your 3D substrates. It handles inorganic and organic precursors, including extremely low-vapor-pressure materials, in both thermal and plasma-enhanced MLD and ALD.
And yes — PRIME is completely air-cooled. No chill water required.
| Chamber volume | 4× larger than GEMStar XT |
|---|---|
| Precursor materials supported | Inorganics and organics |
| Extremely low vapor-pressure materials | Yes |
| Deposition modes | Thermal MLD & ALD, plasma MLD & ALD; flow-through and exposure operation |
| Pressure control | Yes |
| Substrate types | 2D (wafers) and 3D (particles & objects) — single-substrate and batch operation up to 200 mm or M12; batch up to 20 × 200 mm wafers or 210 × 210 mm panels |
| Targeted applications | Research and production |
| Cooling | Fully air-cooled — no chill water required |
Configure your ideal MLD, ALD, or hybrid solution.
Both bases are customer-configurable to meet your specific deposition requirements, with configurable options familiar to GEMStar customers.
The first of its kind.
PRIME VERDE was designed specifically to address the unique challenge of handling and delivering organic precursors — the first commercially available solution developed specifically for MLD.
- Specifically designed to excel at growing organic films
- In-situ self-clean maintenance for organics
- Effectively supports and delivers the most challenging precursors
- Intuitive multi-level heads-up graphical user interface (GUI)
- Next-generation safety protocols protecting the system and operators
- Fully supports 2D and 3D objects
- Field-reconfigurable as your needs change
The ALD power house.
An ALD powerhouse configurable with up to 15 sources, PRIME PLATINUM represents the most powerful ALD system offered by Arradiance.
- Improved reactor and precursor-delivery thermal uniformity, with increased process control
- Increased capability handling low-volatility precursors
- Intuitive multi-level heads-up graphical user interface (GUI)
- Next-generation safety protocols protecting the system and operators
- Single-substrate and batch operation up to 200 mm or M12 substrates and 3D objects
- Field-reconfigurable as your needs change
Start with a base. Build exactly what you need.
Begin with either the PLATINUM or VERDE base, then configure it to meet your current and future MLD, ALD, or hybrid-film requirements.
- Customize for your substrates and specific precursors/materials
- Numerous plug-and-play options to meet demanding requirements
- Designed for ease of service and maintenance
- Field-reconfigurable as your needs change
- Substrate support tailored to your specific substrate(s)
Request a PRIME quote.
Tell us your substrate, target material, precursor chemistry, and throughput. A specialist will help you configure a VERDE, PLATINUM, or fully custom PRIME platform.
Request More Information