Customer voices.

Purdue University was one of the earliest adopters of the Arradiance GEMStar XT-P Plasma PEALD system. Our overall experience with the GEMStar XT-P Plasma system, service and support from Arradiance has been excellent. We would highly recommend that you contact Arradiance for your ALD or PEALD system and coating needs.

The Arradiance GEMStar-6 reactor has been in use in my laboratory for eight months continuously now and has performed consistently. It has worked from day one, and we have had no downtime at all so far, not even pump oil changes (with the exhaust abatement system). The chamber temperature is well controlled and the films are homogeneous.

The Arradiance GEMStar-XT reactor in my laboratory is consistently producing high quality hole-blocking layer TiO₂ film in my perovskite solar cell research. The ALD-based TiO₂ layer through GEMStar-XT enables a high power conversion efficiency of 20% repeatedly, and I am very pleased with the performance of the GEMStar ALD tool.

The Texas State University Nanofabrication Research Service Center is extremely pleased with the versatility of our GEMStar XT-DP PEALD System. The equipment is compact, economical, easily installed, well documented, and uses an intuitive user interface. Arradiance technical staff have rapidly responded to my requests for recipes and new chemistry support. To date we have trained more than 25 users in our shared cleanroom facility who have successfully deposited TiO₂, Al₂O₃, ZnO, Al:ZnO, ZrO₂, and SnO₂.

The GEMStar-8 ALD system is critical to our nanomaterials for clean-energy research. In particular, the particle holder has been working perfectly for ALD coatings on nanostructured materials for Li batteries and fuel cells — even better than expected.

We study the properties of biomolecules using various nanoscale systems. This requires the fabrication of uniform ultrathin freestanding membranes, some of which are deposited using our GEMStar ALD system. This system is small, easy to use, low-maintenance, and has been a workhorse for us — it just runs.

GEMStar-6 has everything our lab environment should need in an ALD tool. It is small, flexible, and can handle up to six-inch wafers. We also like the 1-inch height of the chamber that accommodates small, three-dimensional objects and the port we can use for in-situ metrology. The design appears to be rugged and easy to service.

Much of our research is based around arrays of vertical nanostructures. The GEMStar ALD system allows us to deposit very uniform metallic and oxide thin films over these structures.