Benchtop and floor-standing ALD systems, built for ease of use, low cost of ownership, and film reproducibility.
Two product families cover thermal and plasma-enhanced ALD and MLD, from a single-bench R&D tool to an expanded-capability platform. Both are engineered around predictable chemistry and a service relationship that lasts.
GEMStar
The benchtop ALD family. Three reactor variants — XT (thermal), XT-R (thermal, plasma-upgradeable), and XT-P (plasma) — plus glovebox-integrated configurations and a deep options catalog.
PRIME
A step up in capability and chamber options. VERDE targets demanding organic-precursor chemistries; PLATINUM extends configuration and options for labs pushing beyond the benchtop.
Specifications side-by-side.
Final, configuration-specific specs are confirmed on each product’s datasheet and in your quote.
| Specification | GEMStar | PRIME |
|---|---|---|
| Process type | Thermal ALD/MLD; plasma-enhanced ALD/MLD (XT-P: 300 W air-cooled ICP) | Thermal & plasma-enhanced ALD/MLD; flow-through & exposure modes |
| Footprint | Benchtop — 32 × 24 × 11 in (W × L × H), < 150 lb; glovebox-compatible | Floor-standing — 36.7 × 65.3 × 74.8 in (W × L × H) |
| Reactor temperature | Two zones up to 300 °C ± 1 °C (450 °C optional) | Thermal & plasma-enhanced; configurable |
| Substrate handling | Up to 200 mm wafers (150/100 mm options); high-aspect-ratio powders & 3D parts; batch cassettes | 2D wafers & 3D particles/objects; up to 20 × 200 mm wafers or 210 × 210 mm panels |
| Chamber capacity | Single-substrate & batch benchtop reactor | ≈ 4× the GEMStar XT chamber volume |
| Precursor manifold | Single/dual 200 °C manifold zones; 4 (S)/8 (D) high-speed ALD valve ports; Pulsed Vapor Push for low-vapor-pressure precursors; up to 4–6 DOT-certified 150 mL bottles | Configurable precursor sources (PLATINUM up to 15); supports extremely low-vapor-pressure materials; standard metrology port |
| Cooling | Air-cooled (incl. plasma head); 110–120 VAC, 20 A | Fully air-cooled — no chilled water required |
| Variants | XT-S/D, XT-R, XT-P | VERDE, PLATINUM, Custom |
| Typical users | University & corporate R&D labs; cluster tool configurations & production lines | R&D scale-up & production |
Tell us about your process.
Substrate, target material, temperature range, throughput — share the basics and a specialist will recommend a configuration and a quote.
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