GEMStar™ benchtop ALD systems, engineered for world-class performance.
The system behind hundreds of independently published studies. GEMStar runs thermal ALD, plasma-enhanced ALD, and MLD on wafers, powders, and 3D parts. Install on a bench, in a glovebox, or as part of a custom integrated process system.
Three reactor versions plus a glovebox-integrated option.
Start where your chemistry is today. Upgrade when it changes.
All GEMStar systems share the same proven core: configurable manifolds, heated precursor delivery up to 200 °C, Arradiance’s Pulsed Vapor Push (PVP™) for low-vapor-pressure precursors, and GEMFlow™ control software with real-time process history. Pick the variant that matches the process you’re running today, and you have a clear path to plasma-enhanced and oxygen-sensitive work as your roadmap grows.
| Version | Process | What sets it apart | Choose it for |
|---|---|---|---|
| GEMStar XT | Thermal ALD/MLD | The base benchtop workhorse; Pulsed Vapor Push (PVP™) for low-vapor-pressure precursors | Everyday thermal ALD/MLD on a bench |
| GEMStar XT-R | Thermal ALD/MLD, plasma-upgradeable | Ships plasma-ready; add the plasma electronics in the field later | Thermal now, a clear path to plasma |
| GEMStar XT-P | Thermal + plasma-enhanced (PEALD) | 300 W air-cooled ICP plasma on the proven GEMStar platform | Nitrides, metals, denser or lower-temperature films |
Any of the three reactors can be paired with an integrated glovebox for moisture- and oxygen-sensitive work (controlled to < 1 ppm).
The ALD deposition workhorse.
For solar cell, biotechnology, energy research and beyond. GEMStar XT delivers reliable thermal ALD and MLD on the most demanding R&D bench.
- Reactor temperature up to 300 °C
- Up to four movable bottle-heated zones
- Gas distribution delivery up to 200 °C
- Pulsed Vapor Push (PVP™) for low-vapor-pressure precursors
- Flow-through and exposure deposition modes
- Substrates up to 200 mm — single-substrate or batch cassette; configurable end effectors (200 mm default, 150 mm and 100 mm options)
- Proven beyond the lab: used in cluster tool configurations and on production lines
- MFC-controlled carrier gas input
- GEMFlow™ control software with real-time user interface
Thermal today. Plasma when you need it.
If your current requirements are thermal ALD and you need a future path to PEALD, choose GEMStar XT-R. The reactor ships ready — the plasma electronics are added in the field when you’re ready.
- All GEMStar XT features
- XT-P reactor body, factory-installed
- Field-upgradeable to full XT-P plasma capability
A powerful plasma-enhanced ALD system.
Extend your research and processing to the next level with plasma-enhanced ALD — on the same proven GEMStar platform.
- All GEMStar XT features
- 300 W air-cooled direct inductively coupled plasma (ICP) RF system
- Four metal-sealed, user-selectable mass-flow-controlled gas inputs
- Arradiance RGIP™ control system — safely handles reactive gas inputs for thermal and PEALD
Single, dual, and custom glovebox-integrated stations.
Any GEMStar reactor — XT, XT-R, or XT-P — can be paired with an integrated glovebox for moisture- and oxygen-sensitive work. Side and back mounting, multiple antechamber sizes, and full automation.
- Side and back mounting
- Large and small antechambers
- Integrated gas-purification system
- PLC controller and HMI
- GEMStar stand and frames
- Automated antechamber regeneration
- Automated large-antechamber purging
- Vacuum pump
- Controlled to less than 1 ppm moisture and oxygen
Configure for your chemistry.
A representative selection of GEMStar options and accessories. Each links to its datasheet. Your quote details the full set for your application.
Glovebox interface
Vacuum load lock
ALD material bottles
Bottle heater jackets
End effector system
Front-loading tray
200 mm heated susceptor
Particle coating
Particle canister set
Gauge protector
QCM microbalance
Ozone generator
Slow Pump PR™
Enhanced dry pump package
Glovebox systems
Site-prep documents.
Physical dimensions, weights, electrical power, and gas requirements for each current GEMStar process system. All systems are CE-marked, “Watchdog”-protected, and shipped with an EMO interface. CSA certification is available on request.
ARR-EV-A10-P-EPP — engineered for GEMStar.
The Enhanced Dry Pump Package is the combination of the ARR‑EBARA EV-A10 dry pump and our ARR‑RD003000 dry-pump multi-trap. Engineered in partnership with critical suppliers for optimum process performance and low maintenance without sacrificing reliability.
This combination is what our own service chase runs — even under heavy use it has eliminated pump failures through unexpected power outages and factory shutdowns.
If it’s not in the catalog, let’s build it.
We specialize in atomic layer deposition. If you can’t find exactly what you need in our standard process systems or options, our engineering team is ready for your challenge.
Download custom-equipment overview (PDF) Contact process system sales
Request a GEMStar quote.
Share your substrate, target material, and throughput. A specialist will recommend a configuration.
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