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Arradiance PRIME™ Series

Transformative and Next Generation MLD & ALD Solutions

For Advanced Materials and Complex Structures

Leveraging the reliability and low cost of ownership of the extremely successful and proven GEMStar XT™ Platform, PRIME™ delivers improved performance and capability:

Chamber Volume4 times larger than GEMStar XT
Precursor Materials supportedInorganics and Organics
Extremely low Vapor Pressure MaterialsYES
Deposition ModesThermal MLD & ALD, Plasma MLD & ALD Capable of Flow-thru & Expo Operation
Pressure ControlYES
Substrate Types2D (wafers) and 3D (Particles & Objects)
Targeted Applications / UseResearch and Production

Two PRIME™ base systems

To configure your ideal MLD, ALD or Hybrid solution

Both bases are Customer configurable to meet your specific deposition requirements with configurable options familiar to GEMStar Customers

PRIME™ VERDEdesigned for MLD to handle the most challenging organic precursors
PRIME™ PLATINUMan ALD powerhouse configurable with up to 14 Sources

And YES, PRIME is completely Air-cooled - no chill water required!

Whether you are ready to ramp up your through-put or size up your 3D substrates, a PRIME platform solution is ready to be configured specifically for you.

For more information

Please contact Process System Sales

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PRIME™ Process Systems

Arradiance PRIME VERDE

PRIME™ VERDE

Thermal and Plasma Enhanced MLD

PRIME VERDE represents the first of its kind

Designed specifically to address the unique challenge of handling and delivering organic precursors

  • Specifically designed to excel at growing organic films
  • In situ self-clean maintenance for organics
  • Effectively supports and delivers the most challenging precursors
  • Intuitive multi-level heads-up Graphical User Interface (GUI)
  • Next generation safety protocols protecting the system and operators
  • Fully supports 2D and 3D objects
  • Field reconfigurable as your needs change
Arradiance PRIME PLATINUM

PRIME™ PLATINUM

Thermal and Plasma Enhanced ALD

An ALD powerhouse configurable with up to 14 Sources

PRIME PLATINUM represents the most powerful ALD system offered by Arradiance

  • Improved reactor and precursor delivery thermal uniformity and with increased process control
  • Increased capability with handling low volatile precursors
  • Intuitive multi-level heads-up Graphical User Interface (GUI)
  • Next generation safety protocols protecting the system and operators
  • Single substrate and batch operation up to 200mm or M12 substrates and 3D objects
  • Field reconfigurable as your needs change
Arradiance PRIME CUSTUM

PRIME™ CUSTOM

Configure your ideal MLD, ALD or Hybrid film solution

Start with either the PLATINUM or VERDE base, then configure to meet your current and future requirements

  • Customize for your substrates and specific precursor/materials
  • Numerous plug and play options to meet your demanding requirements
  • Designed for ease of service and maintenance
  • Field reconfigurable as your needs change
  • Substrate support for your specific substrate(s)