Atomic Layer Deposition Equipment

Arradiance Deposition Systems

Engineered for world-class performance on a Benchtop

We help transform your ղTechnology vision into new product technology

GEMStar XT™ systems can be configured as single (4 ALD port) or dual (8 ALD port) 200 °C manifolds with four easily locatable ALD bottle material heated zones, and up to four external gas lines. All systems have one port equipped with our Pulsed Vapor Push technology for low vapor pressure materials. Our GEMFlow™ scripting software allows easy creation of jobs for the most complicated Nano laminate films providing real time history of process and equipment parameters

For more information

Please contact Process System Sales

Molecular Innovation™

Specializing in Atomic Layer Deposition

We provide turn-key Atomic Layer Deposition (ALD) solutions. Our cutting-edge hardware is trusted by the World’s leading thin film research teams. Apply your ALD thin films with one of our compact systems or let us do it for you at our on-site rapid turn foundry

Creating emerging technology worldwide

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• Clean Energy
• Energy Storage
• Sensors
• Micro Electronics
• Nano Technology
• Optoelectronics
• Catalyst Systems

Glovebox Process Systems

Environment isolation

Single, dual, and custom stations available

Glovebox systems includes

• Side and back mounting
• Large and small antechambers
• Integrated Gas Purification system
• PLC Controller and HMI
• GEMStar stand/fames
• Automated antechamber regeneration
• Automated large antechamber Purging
• Vacuum Pump
• Controlled to Less then 1ppm Moisture and Oxygen

GEMStar Quantum

Plasma Enhanced ALD

In addition to GEMStar XT-P

Quantum includes

• All XT-P features
• Three Mass Flow Controlled Auxiliary Gas Inputs
• One Mass Flow Controlled Pulsed Vapor Push Port for low vapor pressure pre-cursors
• Arradiance RGIP™ Control System to safely handle reactive gas inputs for both Thermal and PEALD applications
• GEMFlow™ Control Software with real time user interface

GEMStar XT-P

Plasma Enhanced ALD

A powerful plasma enhanced ALD system

Extending your research and processing requirements to the next level using Plasma Enhanced ALD

XT-P Includes

• All XT features
• 300 Watt air cooled direct Inductively Coupled Plasma (ICP) RF system
• Four metal sealed user selectable Mass Flow Controlled gas inputs

GEMStar XT-R

Thermal ALD

Upgradeable to XT-P

If your current requirements are thermal ALD, and require a future path to PEALD, choose GEMStar XT-R

XT-R Includes

• All XT features
• XT-P Reactor
• Field upgradeable XT-P

GEMStar XT

Thermal ALD

ALD deposition workhorse

Whether you are focused on Solar Cell, biotechnology or energy research

GEMStar XT will deliver on your most demanding requirement

XT includes to name a few

• Reactor temp up to 300°C
• Up to four movable Bottle Heated Zones
• Gas distribution delivery up to 200°C
• Pulsed Vapor Push (PVP™)
• Flow-through and exposure deposition
• Configurable substrate end effectors
• MFC controlled carrier gas input

Facilities requirements

for our Process Systems

Downloadable information is provided below

These include physical sizes, weights, and electrical power requirements for our current Process Systems

All our Systems are CE Marked, "Watchdog" protected, have an EMO interface. CSA Certification is available on request.

• Integrated Systems
• GEMStar XT-P
• GEMStar XT-R
• GEMStar XT
• Glovebox Interface
• EMO Interface

For additional information

Please contact Customer Support

Recommended
Vacuum Pumps and Traps

For GEMStar XT process systems

Engineered to maximize performance and reliability of our GEMStar Systems

The ARR-EV-A10-P-EPP Enhanced Dry Pump Package is the combination of the ARR-EBARA EV-A10 EBARA DRY Pump and our ARR-RD003000 Dry Pump Multi-Trap

Engineered in partnership with critical our critical suppliers to provide optimum process performance and low maintenance without sacrificing reliability

This combination is being used in our service chase and even under heavy use, we have eliminated pump failures though power unexpected outages and factory shut downs

Custom Equipment Solutions

We provide custom systems and options

Let us know what you need

We specialize in Atomic Layer Deposition. If you can’t find exactly what you need in our standard process systems or options

Our engineering team is ready for your challenge!

Please contact Process System Sales

Papers and publications

Learn how our Systems are used

By our valued customers

Our GEMStar systems are deployed worldwide developing new technology

• View publications
• Clean Energy
• Energy Storage
• Sensors
• Micro Electronics
• Nano Technology
• Optoelectronics
• Catalyst Systems